Structural investigation of silicon films chemically vapour deposited onto amorphous SiO2 substrates
J. Adamczewska, T. BudzyńskiVolume:
56
Year:
1979
Language:
english
Pages:
11
DOI:
10.1016/0040-6090(79)90128-7
File:
PDF, 718 KB
english, 1979