Determination of the depth resolution in Auger depth...

Thin Solid Films 1979 Vol. 57; Iss. 2

Determination of the depth resolution in Auger depth profiling measurements

Klaus Röll, Christoph Hammer
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Volume:
57
Year:
1979
Language:
english
Pages:
4
DOI:
10.1016/0040-6090(79)90150-0
File:
PDF, 269 KB
english, 1979
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