The deposition of group III nitrides on silicon substrates

Thin Solid Films 1979 Vol. 59; Iss. 1

The deposition of group III nitrides on silicon substrates

E. Butter, G. Fitzl, D. Hirsch, G. Leonhardt, W. Seifert, G. Preschel
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Volume:
59
Year:
1979
Language:
english
Pages:
7
DOI:
10.1016/0040-6090(79)90360-2
File:
PDF, 333 KB
english, 1979
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