D.C. reactively sputtered iron oxide films for selectively...

Thin Solid Films 1980 Vol. 67; Iss. 1

D.C. reactively sputtered iron oxide films for selectively semitransparent photomasks II: Relation between the structure of the films and their mechanical and chemical properties

V. Orlinov, B. Goranchev, G. Sarov, A. Misiuk
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Volume:
67
Year:
1980
Language:
english
Pages:
10
DOI:
10.1016/0040-6090(80)90297-7
File:
PDF, 430 KB
english, 1980
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