![](/img/cover-not-exists.png)
TaAlN thin film resistors with improved electrical properties
P.K. Reddy, G.K. Bhagavat, S.R. JawalekarVolume:
70
Year:
1980
Language:
english
Pages:
9
DOI:
10.1016/0040-6090(80)90408-3
File:
PDF, 459 KB
english, 1980