Thermal effects during the deposition of thin silver, gold and copper films and their influence on internal stress measurements
R. Abermann, H.P. Martinz, R. KramerVolume:
70
Year:
1980
Language:
english
Pages:
11
DOI:
10.1016/0040-6090(80)90420-4
File:
PDF, 597 KB
english, 1980