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Properties of thin film capacitors made with reactively sputtered Ta-Al
P.K. Reddy, G.K. Bhagavat, S.R. JawalekarVolume:
72
Year:
1980
Language:
english
Pages:
6
DOI:
10.1016/0040-6090(80)90528-3
File:
PDF, 389 KB
english, 1980