Conduction properties of various reactively evaporated...

Thin Solid Films 1981 Vol. 82; Iss. 3

Conduction properties of various reactively evaporated silicon oxide films

Wolfgang Herdt, Hiroshi Adachi, Hans L. Hartnagel
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Volume:
82
Year:
1981
Language:
english
Pages:
5
DOI:
10.1016/0040-6090(81)90197-8
File:
PDF, 267 KB
english, 1981
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