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GaAs monolithic devices: The role of plasma and ion beam techniques in circuit fabrication
K.C. Vanner, J.R. Cockrill, R.S. ButlinVolume:
80
Year:
1981
Language:
english
Pages:
8
DOI:
10.1016/0040-6090(81)90219-4
File:
PDF, 554 KB
english, 1981