Optical constants of silicon films deposited by the r.f....

Optical constants of silicon films deposited by the r.f. glow discharge of SiCl4

V. Augelli, R. Murri, L. Schiavulli, G. Bruno, P. Capezzuto, F. Cramarossa, F. Evangelisti, G. Fortunato
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Volume:
86
Year:
1981
Language:
english
Pages:
9
DOI:
10.1016/0040-6090(81)90344-8
File:
PDF, 490 KB
english, 1981
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