Optical constants of silicon films deposited by the r.f. glow discharge of SiCl4
V. Augelli, R. Murri, L. Schiavulli, G. Bruno, P. Capezzuto, F. Cramarossa, F. Evangelisti, G. FortunatoVolume:
86
Year:
1981
Language:
english
Pages:
9
DOI:
10.1016/0040-6090(81)90344-8
File:
PDF, 490 KB
english, 1981