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X-ray determination of strain and texture in sputtered molybdenum and titanium films on silicon
R.J. Yesensky, V. Rao, C.R. HouskaVolume:
79
Year:
1981
Language:
english
Pages:
12
DOI:
10.1016/0040-6090(81)90425-9
File:
PDF, 459 KB
english, 1981