Observation of gas absorption in evaporated amorphous silicon films using secondary ion mass spectrometry
Charles W. Magee, J.C. Bean, G. Foti, J.M. PoateVolume:
81
Year:
1981
Language:
english
Pages:
6
DOI:
10.1016/0040-6090(81)90496-x
File:
PDF, 300 KB
english, 1981