The anomalous refractive index in the ellipsometric...

The anomalous refractive index in the ellipsometric evaluation of an inhomogeneous film

Jyoji Nakata, Kenji Kajiyama
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Volume:
80
Year:
1981
Language:
english
Pages:
11
DOI:
10.1016/0040-6090(81)90605-2
File:
PDF, 546 KB
english, 1981
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