Complete thin film system for hybrid circuits sputtered with the plasmatron
S. Schiller, U. Heisig, K. Goedicke, H. Bilz, G. Pfeil, J. Henneberger, G. VoglerVolume:
83
Year:
1981
Language:
english
Pages:
8
DOI:
10.1016/0040-6090(81)90662-3
File:
PDF, 450 KB
english, 1981