Vacuum lithography using plasma polymerization and plasma...

Thin Solid Films 1981 Vol. 83; Iss. 2

Vacuum lithography using plasma polymerization and plasma development

Shuzo Hattori, Junji Tamano, Masao Yamada, Masayuki Ieda, Shinzo Morita, Katsumi Yoneda, Shintaro Ishibashi
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Volume:
83
Year:
1981
Language:
english
Pages:
6
DOI:
10.1016/0040-6090(81)90665-9
File:
PDF, 443 KB
english, 1981
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