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Oxidation of InP in a plasma-enhanced chemical vapor deposition reactor
J.F. Wager, W.H. Makky, C.W. Wilmsen, L.G. MeinersVolume:
95
Year:
1982
Language:
english
Pages:
8
DOI:
10.1016/0040-6090(82)90040-2
File:
PDF, 483 KB
english, 1982