Characterization of titanium nitride films deposited onto silicon
A. Armigliato, G. Celotti, A. Garulli, S. Guerri, P. Ostoja, R. Rosa, G. MartinelliVolume:
92
Year:
1982
Language:
english
Pages:
6
DOI:
10.1016/0040-6090(82)90158-4
File:
PDF, 1.49 MB
english, 1982