The problem of reactive sputtering and cosputtering of...

Thin Solid Films 1982 Vol. 92; Iss. 4

The problem of reactive sputtering and cosputtering of elemental targets

K. Steenbeck, E. Steinbeiß, K.-D. Ufert
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Volume:
92
Year:
1982
Language:
english
Pages:
10
DOI:
10.1016/0040-6090(82)90162-6
File:
PDF, 450 KB
english, 1982
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