Analytical growth mechanisms of uniaxially oriented films in ion-based processes
Kakuei Matsubara, Yoshihiro Fukumoto, Toshinori TakagiVolume:
92
Year:
1982
Language:
english
Pages:
6
DOI:
10.1016/0040-6090(82)90188-2
File:
PDF, 316 KB
english, 1982