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Phosphorus diffusion into silicon from chemically vapour-deposited phosphosilicate glass
G.F. Cerofolini, M.L. Polignano, P. Picco, M. Finetti, S. Solmi, M. GalloriniVolume:
87
Year:
1982
Language:
english
Pages:
6
DOI:
10.1016/0040-6090(82)90290-5
File:
PDF, 307 KB
english, 1982