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Effect of the oxygen pressure during sputtering on the properties of thin CuOx films
G. Beensh-Marchwicka, L. Kròl-Stȩpniewska, M. SłabyVolume:
88
Year:
1982
Language:
english
Pages:
7
DOI:
10.1016/0040-6090(82)90347-9
File:
PDF, 322 KB
english, 1982