Epitaxial reordering of ion-irradiated NiSi2 layers
M. Mäenpää, L.S. Hung, M.-A. Nicolet, D.K. Sadana, S.S. LauVolume:
87
Year:
1982
Language:
english
Pages:
8
DOI:
10.1016/0040-6090(82)90364-9
File:
PDF, 531 KB
english, 1982