Sputter-Auger and Auger line shape analyses of SiC films...

Thin Solid Films 1982 Vol. 90; Iss. 3

Sputter-Auger and Auger line shape analyses of SiC films produced by simultaneous sputter deposition of silicon and carbon

P. Morgen, T.W. Barbee Jr., K. Seaward
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Volume:
90
Year:
1982
Language:
english
DOI:
10.1016/0040-6090(82)90391-1
File:
PDF, 52 KB
english, 1982
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