Helium ion bombardment of thin aluminium films

Thin Solid Films 1982 Vol. 94; Iss. 4

Helium ion bombardment of thin aluminium films

S.E Donnelly, F Bodart, K.M Barfoot, R Werz, R.P Webb
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Volume:
94
Year:
1982
Language:
english
Pages:
17
DOI:
10.1016/0040-6090(82)90491-6
File:
PDF, 1.82 MB
english, 1982
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