Annealing encapsulants for InP I: Auger electron and...

Annealing encapsulants for InP I: Auger electron and secondary ion mass spectrometric studies

J.D. Oberstar, B.G. Streetman, J.E. Baker, N.L. Finnegan, E.A. Sammann, Peter Williams
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Volume:
94
Year:
1982
Language:
english
Pages:
11
DOI:
10.1016/0040-6090(82)90507-7
File:
PDF, 623 KB
english, 1982
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