Sputtering and chemical vapour deposition of piezoelectric ZnO, AlN and K3Li2Nb5O15 films for optical waveguides and surface acoustic wave devices
Tadashi Shiosaki, Masatoshi Adachi, Akira KawabataVolume:
96
Year:
1982
Language:
english
Pages:
12
DOI:
10.1016/0040-6090(82)90611-3
File:
PDF, 967 KB
english, 1982