Preparation of ZnO thin films by plasma-enhanced...

Thin Solid Films 1982 Vol. 96; Iss. 2

Preparation of ZnO thin films by plasma-enhanced organometallic chemical vapour deposition

Masaru Shimizu, Tadashi Horii, Tadashi Shiosaki, Akira Kawabata
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Volume:
96
Year:
1982
Language:
english
Pages:
6
DOI:
10.1016/0040-6090(82)90613-7
File:
PDF, 941 KB
english, 1982
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