Electromigration in sputtered Al-Cu thin films

Electromigration in sputtered Al-Cu thin films

K.P Rodbell, S.R Shatynski
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Volume:
108
Year:
1983
Language:
english
Pages:
8
DOI:
10.1016/0040-6090(83)90045-7
File:
PDF, 463 KB
english, 1983
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