Optical and electrical properties of ZnO films prepared by high rate sputtering
T. Hata, K. Toriyama, J. Kawahara, M. OzakiVolume:
108
Year:
1983
Language:
english
Pages:
8
DOI:
10.1016/0040-6090(83)90081-0
File:
PDF, 346 KB
english, 1983