Fabrication and testing of trilayers with a high deposition rate plasma-polymerized spacer
N.J. Mazzeo, K.Y. Ahn, V.B. Jipson, H.N. LyntVolume:
108
Year:
1983
Language:
english
Pages:
7
DOI:
10.1016/0040-6090(83)90085-8
File:
PDF, 353 KB
english, 1983