Chemical deposition of PAsxNy films onto III–V compound...

Thin Solid Films 1983 Vol. 103; Iss. 1-3

Chemical deposition of PAsxNy films onto III–V compound semiconductors

Eiichi Yamaguchi, Yukihiro Hirota, Makoto Minakata
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Volume:
103
Year:
1983
Language:
english
Pages:
9
DOI:
10.1016/0040-6090(83)90436-4
File:
PDF, 401 KB
english, 1983
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