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Reflection high energy electron diffraction and X-ray studies of AlN films grown on Si(111) and Si(001) by organometallic chemical vapour deposition
Yoshiki Chubachi, Kiyotaka Sato, Kiyoaki KojimaVolume:
122
Year:
1984
Language:
english
Pages:
12
DOI:
10.1016/0040-6090(84)90052-x
File:
PDF, 838 KB
english, 1984