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Radical-molecule and ion-molecule mechanisms in the polymerization of hydrocarbons and chlorosilanes in r.f. plasmas at low pressures (below 1.0 Torr)
R. Avni, U. Carmi, A. Inspektor, I. RosenthalVolume:
118
Year:
1984
Language:
english
Pages:
11
DOI:
10.1016/0040-6090(84)90076-2
File:
PDF, 646 KB
english, 1984