The influence of the structure of amorphous silicon...

The influence of the structure of amorphous silicon deposited in ultrahigh vacuum on the solid phase epitaxial growth rate

I.G. Kaverina, V.V. Korobtsov, V.G. Lifshits, V.G. Zavodinskii, A.V. Zotov
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Volume:
117
Year:
1984
Language:
english
Pages:
6
DOI:
10.1016/0040-6090(84)90082-8
File:
PDF, 399 KB
english, 1984
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