The simultaneous growth of monocrystalline and polycrystalline silicon films with controlled parameters
A.G. Abdullayev, F.D. Kasimov, V.M. MamikonovaVolume:
115
Year:
1984
Language:
english
Pages:
7
DOI:
10.1016/0040-6090(84)90184-6
File:
PDF, 419 KB
english, 1984