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Deposition of hard wear-resistant coatings by reactive D.C. Plasmatron sputtering
S. Schiller, U. Heisig, G. Beister, K. Steinfelder, J. Strümpfel, Chr. Korndörfer, W. SieberVolume:
118
Year:
1984
Language:
english
Pages:
16
DOI:
10.1016/0040-6090(84)90196-2
File:
PDF, 1.28 MB
english, 1984