Annealing of ion-implanted silicon-on-insulator films using...

Thin Solid Films 1984 Vol. 115; Iss. 1

Annealing of ion-implanted silicon-on-insulator films using a scanned graphite strip heater

S.K. Banerjee, B. Lee, J.E. Baker, D.A. Reed, B.G. Streetman
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Volume:
115
Year:
1984
Language:
english
Pages:
8
DOI:
10.1016/0040-6090(84)90312-2
File:
PDF, 393 KB
english, 1984
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