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Investigation of ion-implanted semiconductors by ellipsometry and backscattering spectrometry
M. Fried, T. Lohner, E. Jároli, Gy. Vizkelethy, G. Mezey, J. Gyulai, M. Somogyi, H. KerkowVolume:
116
Year:
1984
Language:
english
Pages:
8
DOI:
10.1016/0040-6090(84)90423-1
File:
PDF, 376 KB
english, 1984