Dry etching of gratings on spin-coated As2S3 films

Dry etching of gratings on spin-coated As2S3 films

K. Kase, G.C. Chern, I. Lauks
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Volume:
116
Year:
1984
Language:
english
Pages:
1
DOI:
10.1016/0040-6090(84)90453-x
File:
PDF, 95 KB
english, 1984
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