Stress in chemically vapour-deposited silicon films

Stress in chemically vapour-deposited silicon films

J. Adamczewska, T. Budzyński
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Volume:
113
Year:
1984
Language:
english
Pages:
15
DOI:
10.1016/0040-6090(84)90469-3
File:
PDF, 737 KB
english, 1984
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