Ion beam mixing of aluminium films on fused SiO2

Thin Solid Films 1984 Vol. 115; Iss. 2

Ion beam mixing of aluminium films on fused SiO2

M. Erola, J. Keinonen, H.J. Whitlow, A. Anttila, M. Hautala
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Volume:
115
Year:
1984
Language:
english
Pages:
10
DOI:
10.1016/0040-6090(84)90513-3
File:
PDF, 462 KB
english, 1984
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