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Modelling of glow discharge sputtering systems: Theory of the cathode fall region
A. Gras-Marti, I. Abril, J.A. Valles-AbarcaVolume:
124
Year:
1985
Language:
english
Pages:
7
DOI:
10.1016/0040-6090(85)90029-x
File:
PDF, 318 KB
english, 1985