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Analysis of a reactive sputter ion plating discharge for TiN deposition using optical emission spectroscopy
A. Ricard, H. Michel, P. Jacquot, M. GantoisVolume:
124
Year:
1985
Language:
english
Pages:
7
DOI:
10.1016/0040-6090(85)90030-6
File:
PDF, 289 KB
english, 1985