Effect of dilution gases in methane on the deposition of...

Thin Solid Films 1985 Vol. 128; Iss. 3-4

Effect of dilution gases in methane on the deposition of diamond-like carbon in a microwave discharge

Osamu Matsumoto, Hiroaki Toshima, Yasushi Kanzaki
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
128
Year:
1985
Language:
english
Pages:
11
DOI:
10.1016/0040-6090(85)90084-7
File:
PDF, 674 KB
english, 1985
Conversion to is in progress
Conversion to is failed