Stoichiometry and friction properties of sputtered MoSx layers
H. Dimigen, H. Hübsch, P. Willich, K. ReicheltVolume:
129
Year:
1985
Language:
english
Pages:
13
DOI:
10.1016/0040-6090(85)90097-5
File:
PDF, 730 KB
english, 1985