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Optical characterization of polycrystalline silicon before and after thermal oxidation
P. Montaudon, M.H. Debroux, F. Ferrieu, A. VareilleVolume:
125
Year:
1985
Language:
english
Pages:
7
DOI:
10.1016/0040-6090(85)90227-5
File:
PDF, 343 KB
english, 1985