Lateral growth of platinum and palladium silicides on an...

Lateral growth of platinum and palladium silicides on an SiO2 layer

G. Majni, F. Panini, G. Sodo, P. Cantoni
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Volume:
125
Year:
1985
Language:
english
Pages:
8
DOI:
10.1016/0040-6090(85)90238-x
File:
PDF, 1.35 MB
english, 1985
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