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Multilayers deposited by triode sputtering using a new accurate method of film thicknesses monitoring
C. Sella, Tran-Khanh-VienVolume:
125
Year:
1985
Language:
english
Pages:
6
DOI:
10.1016/0040-6090(85)90246-9
File:
PDF, 286 KB
english, 1985