Chemical vapour deposition of titanium oxides in the...

Thin Solid Films 1985 Vol. 124; Iss. 2

Chemical vapour deposition of titanium oxides in the composition range TiO1.60–TiO1.75

Eva Fredriksson, Jan-Otto Carlsson
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Volume:
124
Year:
1985
Language:
english
Pages:
8
DOI:
10.1016/0040-6090(85)90252-4
File:
PDF, 438 KB
english, 1985
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