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R.F. reactive sputter deposition of hydrogenated amorphous silicon carbide films
B. Goranchev, K. Reichelt, J. Chevallier, P. Hornshoj, H. Dimigen, H. HübschVolume:
139
Year:
1986
Language:
english
Pages:
11
DOI:
10.1016/0040-6090(86)90057-x
File:
PDF, 624 KB
english, 1986